Interconnect structure with enhanced reliability

ABSTRACT

An improved interconnect structure including a dielectric layer having a conductive feature embedded therein, the conductive feature having a first top surface that is substantially coplanar with a second top surface of the dielectric layer; a metal cap layer located directly on the first top surface, wherein the metal cap layer does not substantially extend onto the second top surface; a first dielectric cap layer located directly on the second top surface, wherein the first dielectric cap layer does not substantially extend onto the first top surface and the first dielectric cap layer is thicker than the metal cap layer; and a second dielectric cap layer on the metal cap layer and the first dielectric cap layer. A method of forming the interconnect structure is also provided.

FIELD OF THE INVENTION

The present invention relates to an interconnect structure, and a methodof fabricating the same. More particularly, the present inventionrelates to an interconnect structure having enhanced electromigration(EM) and time dependent dielectric breakdown (TDDB) reliabilities. Thepresent invention also provides a method of forming such an interconnectstructure.

BACKGROUND OF THE INVENTION

Semiconductor devices generally include a plurality of circuits whichform an integrated circuit fabricated on a semiconductor substrate. Toimprove the performance of the circuits, low k dielectric materialshaving a dielectric constant of less than silicon dioxide, such asporous dielectric materials, have been used as inter-layer dielectric(ILD) to further reduce capacitance. Interconnect structures made ofmetal lines or vias are usually formed in and around the porousdielectric material ILD to connect elements of the circuits. Aninterconnect structure may consist of multilevel or multilayeredschemes, such as, for example, single or dual damascene wiringstructures. Within a typical interconnect structure, metal lines runparallel to the semiconductor substrate, while metal vias runperpendicular to the semiconductor substrate.

Electromigration (EM) and time dependent dielectric breakdown (TDDB) aretwo major reliability concerns for copper (Cu) interconnects. EM is thetransport of material caused by the gradual movement of the ions in aconductor due to the momentum transfer between conducting electrons anddiffusing metal atoms. TDDB occurs when adjacent interconnects arebiased differently over an extended period of time which results inleakage current increase and eventually electrical shorts. Both EM andTDDB decrease the reliability of metal interconnects.

To reduce EM and TDDB of a metal interconnect, a dielectric cappinglayer is deposited directly on the metal. By atomically bonding to theuppermost surface of the underlying metal, the dielectric capping layerretards EM of the metal interconnect. In order to deposit the dielectriccap layer that atomically adheres to the metal, it is necessary toremove non-metallic materials, e.g., metal oxide of the underlyingmetal, from the surface of the metal. Typically, a “pre-clean” processsuch as plasma treatment is required to remove the metal oxide materialson the metal. Such a pre-clean process can cause damage to thedielectric material surrounding the metal in the metal interconnectstructure. The damage is even worse when the dielectric material is alow dielectric constant (low-k) material.

Another type of capping layer comprises a metallic capping layer.Compared to the dielectric capping layer, the metallic capping layertypically has better adhesion strength to the underlying metal. Theincreased adhesion strength results in better EM resistance to the metalinterconnect. For example, a Cu interconnect with a Co alloy cappinglayer has demonstrated a greater than 10 times EM resistance than the Cuinterconnect with a standard dielectric capping layer. Despite theimprovement in EM resistance, the use of a metallic capping layer tendsto leave metallic residues on the surface of the dielectric materialbetween the metal features in the metal interconnect. The presence ofthe metallic residues hinders the reliability of the metal interconnect.

In view of the above, there is a need for providing a metal interconnectstructure having enhanced EM and TDDB reliabilities. There is also aneed for providing a method for making such a metal interconnectstructure.

SUMMARY OF THE INVENTION

The present invention provides an interconnect structure having a metalcap layer directly on a conductive feature embedded in a dielectriclayer and a dielectric cap layer directly on the dielectric layer. Thedielectric cap layer is thicker than the metal cap layer and has abottom surface that is substantially coplanar with a bottom surface ofthe metal cap layer. The interconnect structure of the present inventionprovides improved EM and TDDB reliabilities compared to conventionalinterconnect structures mentioned above. The present invention alsoprovides a method of forming such an interconnect structure.

A first embodiment introduces an interconnect structure. Theinterconnect structure includes a dielectric layer having a conductivefeature embedded therein, the conductive feature having a first topsurface that is substantially coplanar with a second top surface of thedielectric layer; a metal cap layer located directly on the first topsurface, wherein the metal cap layer does not substantially extend ontothe second top surface; a first dielectric cap layer located directly onthe second top surface, wherein the first dielectric cap layer does notsubstantially extend onto the first top surface and the first dielectriccap layer is thicker than the metal cap layer; and a second dielectriccap layer on the metal cap layer and the first dielectric cap layer.

A second embodiment introduces a method for forming an interconnectstructure. The method includes providing a dielectric layer having aconductive feature embedded therein, the conductive feature having afirst top surface that is substantially coplanar with a second topsurface of the dielectric layer; forming a first dielectric cap layer onthe dielectric layer; removing a portion of the first dielectric caplayer to expose the first top surface of the conductive feature; forminga metal cap layer selectively on the first top surface of the conductivefeature, wherein the metal cap layer is thinner than the firstdielectric cap layer and does not substantially extend onto the secondtop surface; and forming a second dielectric cap layer on the firstdielectric cap layer and the metal cap layer.

BRIEF DESCRIPTION OF THE DRAWINGS

The accompanying drawings are included to provide a furtherunderstanding of the invention, and are incorporated in and constitute apart of this specification. The drawings illustrate embodiments of theinvention and, together with the description, serve to explain theprinciples of the invention.

FIG. 1 is a cross-sectional view that illustrates a prior artinterconnect structure having a metal cap layer atop a conductivefeature in the interconnect structure.

FIGS. 2-8 are cross-sectional views that illustrate the exemplary stepsof a method of making an interconnect structure, in accordance withembodiments of the present invention.

It will be appreciated that for simplicity and clarity of illustration,elements shown in the drawings have not necessarily been drawn to scale.For example, the dimensions of some of the elements may be exaggeratedrelative to other elements for purpose of clarity.

DETAILED DESCRIPTION OF THE INVENTION

The present invention will now be described more fully hereinafter withreference to the accompanying drawings in which preferred embodiments ofthe invention are shown. This invention may, however, be embodied inmany different forms and should not be construed as limited to theillustrated embodiments set forth herein. Rather, these embodiments areprovided so that this disclosure will be thorough and complete, and willfully convey the scope of the invention to those skilled in the art.Like numerals refer to like features throughout.

It will be understood that when an element, such as a layer, is referredto as being “on” or “over” another element, it can be directly on theother element or intervening elements may also be present. In contrast,when an element is referred to as being “directly on” or “directly over”another element, there are no intervening elements present.

As discussed above, despite the improved EM resistance over a dielectriccapping layer, the use of a metal cap layer often causes residual metalon the surface of the dielectric material between the metal features ina metal interconnect structure. The problem in prior art interconnectstructure with a metal cap layer is shown in FIG. 1. The interconnectstructure 100 in FIG. 1 includes two conductive features 104 embedded ina dielectric layer 102. A metal cap layer 106 is on the conductivefeatures 104. A dielectric cap layer 108 is atop the metal cap layer 106and the dielectric layer 102. During the metal cap formation process,metal residues 110 are also formed. Some of the metal residues 110 fallbetween the two conductive features 104 and may cause electrical shortsbetween the two conductive features 104.

The present invention provides an interconnect structure which cansignificantly reduce or eliminate electrical shorts between adjacentconductive features due to metal residues from the metal cap formationprocess. The interconnect structure has a metal cap layer directly on aconductive feature embedded in a dielectric layer and a first dielectriccap layer directly on the dielectric layer. The conductive feature has afirst top surface that is substantially coplanar with a second topsurface of the dielectric layer. The metal cap layer does notsubstantially extend onto the second top surface, while the firstdielectric cap layer does not substantially extend onto the first topsurface. The phrase “does not substantially extend onto” is used in thepresent invention to denote that no or minimal metal cap material is onthe top surface of the dielectric layer. Similarly, no or minimal firstdielectric cap material is on the top surface of the conductive featurein the interconnect structure. The first dielectric cap layer is alsothicker than the metal cap layer. Thus, even if any residual metal capmaterial is left on the first dielectric cap layer during the metal capdeposition process, the continuity between adjacent conductive featuresis broken by the first dielectric cap layer. The word “residual” is usedto denote any fragment of the metal cap material that may be formedduring the metal cap formation step. This prevents electrical shortsbetween adjacent conductive features. As a result, the interconnectstructure of the present invention provides improved EM and TDDBreliabilities compared to conventional interconnect structures mentionedabove.

Referring to FIG. 2, an initial interconnect structure 200 is provided.The initial interconnect structure 200 includes a dielectric layer 202and at least one conductive feature 204 embedded in the dielectric layer202. The initial interconnect structure 200 may be located above asemiconductor substrate (not shown) including one or more semiconductordevices. Optionally, the initial interconnect structure 200 may furtherinclude a diffusion barrier layer (not shown) which separates theconductive feature 204 from the dielectric layer 202.

The initial structure 200 maybe made by conventional techniques wellknown to those skilled in the art. For example, the initial interconnectstructure 200 can be formed by first applying the dielectric layer 202to a surface of a substrate (not shown). The substrate may be asemiconducting material, an insulating material, a conducting materialor a combination of two or more of the foregoing materials. When thesubstrate is comprised of a semiconducting material, a semiconductormaterial such as Si, SiGe, SiGeC, SiC, Ge alloys, GaAs, InAs, InP orother group III/V or II/VI semiconductor materials may be used. Inaddition to these listed types of semiconducting materials, the presentinvention also contemplates cases in which the substrate is a layeredsemiconductor such as, for example, Si/SiGe, Si/SiC,silicon-on-insulators (SOIs) or silicon germanium-on-insulators (SGOIs).When the substrate is a semiconducting material, one or moresemiconductor devices such as, for example, complementary metal oxidesemiconductor (CMOS) devices may be fabricated thereon.

When the substrate is an insulating material, the insulating materialcan be an organic insulator, an inorganic insulator or a combination ofan organic insulator and an inorganic insulator. The substrate can beeither single layer or multilayers.

When the substrate is a conducting material, the substrate may include,for example, polysilicon, an elemental metal, an alloy of elementalmetals, a metal silicide, a metal nitride or a combination of two ormore of the foregoing materials. The substrate can be either singlelayer or multilayers.

The dielectric layer 202 may be any interlevel or intralevel dielectricsincluding inorganic dielectrics or organic dielectrics. The dielectriclayer 202 may be porous or non-porous. Examples of suitable dielectricsthat can be used as the dielectric layer 202 include, but are notlimited to, SiO₂, silsesquioxanes, C doped oxides (i.e.,organosilicates) that include atoms of Si, C, O and H, thermosettingpolyarylene ethers, or multilayers thereof. The term “polyarylene” isused in this application to denote aryl moieties or substituted arylmoieties which are linked together by bonds, fused rings, or inertlinking groups such as, for example, oxygen, sulfur, sulfone, sulfoxide,carbonyl and the like.

Preferably, the dielectric layer 202 has a dielectric constant of about4.0 or less. More preferably, the dielectric layer 202 has a dielectricconstant of about 2.8 or less. These dielectrics generally have a lowerparasitic crosstalk as compared with dielectric materials that have adielectric constant higher than 4.0. The dielectric constants mentionedherein are measured in a vacuum.

The thickness of the dielectric layer 202 may vary depending on thedielectric material used as well as the exact number of dielectric filmswithin the initial interconnects structure 200. Typically, and fornormal interconnect structures, the dielectric layer 202 has a thicknessfrom about 200 nm to about 450 nm.

The conductive feature 204 may be formed by lithography. For example, aphotoresist layer is applied to the surface of the dielectric layer 202.The photoresist layer is exposed to a desired pattern of radiation. Theexposed photoresist layer is developed utilizing a conventional resistdeveloper. The patterned photoresist layer is used as an etch mask totransfer the pattern into the dielectric layer 202. The etched region ofthe dielectric layer 202 is then filled with conductive material to formthe conductive feature 204.

The conductive feature 204 includes, but is not limited to, polysilicon,a conductive metal, an alloy of two or more conductive metals, aconductive metal silicide or a combination of two or more of theforegoing materials. Preferably, the conductive feature 204 is aconductive metal such as Cu, Al, W or their alloys. More preferably, theconductive feature 204 is Cu or a Cu alloy (such as AlCu). Theconductive material is filled into the etched region of the dielectriclayer 202 using a conventional deposition process including, but notlimited to, chemical vapor deposition (CVD), plasma enhanced chemicalvapor deposition (PECVD), sputtering, chemical solution deposition orplating to form the conductive feature 204. After deposition, aconventional planarization process such as, for example, chemicalmechanical polishing (CMP) can be used to provide a structure in whichthe conductive feature 204 has a top surface 208 that is substantiallycoplanar with a top surface 206 of the dielectric layer 202.

The conductive feature 204 is preferably separated from the dielectriclayer 202 by a diffusion barrier layer (not shown). The diffusionbarrier layer may include, but is not limited to, Ta, TaN, Ti, TiN, Ru,RuTaN, RuTa, W, WN or any other material that can serve as a barrier toprevent a conductive material from diffusing into a dielectric materiallayer. The diffusion barrier layer may be formed by a deposition processsuch as, for example, atomic layer deposition (ALD), CVD, PECVD,physical vapor deposition (PVD), sputtering, chemical solutiondeposition, or plating. The diffusion barrier layer may also include abilayer structure that includes a lower layer of a metallic nitride suchas, for example, TaN and an upper metallic layer such as, for example,Ta.

The thickness of the diffusion barrier layer may vary depending on theexact means of the deposition process as well as the material employed.Typically, the diffusion barrier layer has a thickness from about 4 nmto about 40 nm, with a thickness from about 7 nm to about 20 nm beingmore typical.

After forming the at least one conductive feature 204 within thedielectric layer 202, a first dielectric cap layer 210 is formed on theinitial interconnect structure 200 (FIG. 3). The first dielectric caplayer 210 is formed by a conventional deposition process such as, forexample, CVD, PECVD, chemical solution deposition, or evaporation. Thefirst dielectric cap layer 210 may be any suitable dielectric cappingmaterial including, but not limited to, SiC, Si₄NH₃, SiO₂, a carbondoped oxide, a nitrogen and hydrogen doped silicon carbide (SiC(N,H)),or multilayers thereof. The thickness of the first dielectric cappinglayer 210 may vary depending on the exact means of the depositionprocess as well as the material employed. Typically, the firstdielectric capping layer 210 has a thickness from about 5 nm to about 80nm, with a thickness from about 10 nm to about 50 nm being more typical.

In FIG. 4, a portion of the first dielectric cap layer 210 is removed toexpose the top surface 208 of the conductive feature 204. The portion ofthe first dielectric cap layer 210 can be removed lithographically. Forexample, a photoresist layer is applied to the surface of the firstdielectric cap layer 210. The photoresist layer is exposed to a desiredpattern of radiation. The exposed photoresist layer is developedutilizing a conventional resist developer. The patterned photoresistlayer is used as an etch mask to remove the portion of the firstdielectric cap layer 210. As shown in FIG. 4, after the portion isremoved, the remaining first dielectric cap layer 210A does notsubstantially extend onto the top surface 208 of the conductive feature204, i.e., no or minimal first dielectric cap material 210 is on the topsurface 208 of the conductive feature 204 in the interconnect structure.

Next, a metal cap layer 212 is formed selectively on the top surface 208of the conductive feature 204 (FIG. 5). The metal cap layer 212 may beformed by CVD, PECVD, ALD, plasma enhanced atomic layer deposition(PEALD), an electro plating process, or an electroless plating process.The metal cap layer 212 can be any metal suitable for the presentinvention. Preferably, the metal cap layer 212 is Co, Ru, Ir, Rh, Pt,Ta, W, Mn, Mo, Ni, TaN, Ti, Al or an alloy comprising two or more of theforegoing metals. Typically, the metal cap layer 212 has a thicknessfrom about 1 nm to about 20 nm, with a thickness from about 2 nm toabout 10 nm being more typical. As shown in FIG. 5, the metal cap layer212 does not substantially extend onto the top surface 206 of thedielectric layer 202, i.e., no or minimal metal cap material 212 is onthe top surface 206 of the dielectric layer 202 in the interconnectstructure.

The metal cap layer 212 is thinner than the first dielectric cap layer210. Preferably, the metal cap layer 212 has a thickness that is about50% or less of the thickness of the first dielectric cap layer 210. Morepreferably, the metal cap layer 212 has a thickness that is about 20% orless of the thickness of the first dielectric cap layer 210. The metalcap layer 212 has a bottom surface 216 that is substantially coplanarwith a bottom surface 214 of the remaining first dielectric cap layer210A.

During the formation of the metal cap layer 212, residues 218 of themetal cap material may be formed on the remaining first dielectric caplayer 210A. As shown in FIG. 6, because the first dielectric cap layer210A is thicker than the metal cap layer 212, the first dielectric caplayer 210A acts as a dielectric barrier between the two adjacent metalcaps 212 a and 212 b. The first dielectric cap layer 210 thus breaks thecontinuity between the two adjacent conductive features 204 a and 204 b.This prevents electrical shorts between the two adjacent conductivefeatures 204 a and 204 b. As a result, the interconnect structure of thepresent invention provides improved EM and TDDB reliabilities comparedto conventional interconnect structures mentioned above.

Optionally, a cleaning step is performed to remove the residue metal capmaterial 218 to further prevent electrical shorts between the adjacentconductive features. The cleaning step may be a wet cleaning step, aplasma cleaning step, or a touch-up polishing step. The wet cleaningstep may use dilute HF or other acids capable of removing metallicoxides. The plasma cleaning step may take the form of anoble-gas-containing or a H₂-containing plasma. The touch-up polishingstep can be a short-duration chemical mechanical polishing (CMP) step.

In FIG. 7, a second dielectric cap layer 220 is formed on the remainingfirst dielectric cap layer 210A and the metal cap layer 212. The seconddielectric cap layer 220 may be the same or different material than thefirst dielectric cap layer 210. Preferably the second dielectric caplayer 220 is the same material as the first dielectric cap layer 210.Examples of suitable materials that can be used as the second dielectriccap layer 220 include, but are not limited to, SiC, Si₄NH₃, SiO₂, acarbon doped oxide, a nitrogen and hydrogen doped silicon carbide(SiC(N,H)), or multilayers thereof. The second dielectric cap layer 220may be formed by a conventional deposition process such as, for example,CVD, PECVD, chemical solution deposition, or evaporation. The thicknessof the second dielectric cap layer 220 may vary depending on the exactmeans of the deposition process as well as the material employed.Typically, the second dielectric cap layer 220 has a thickness fromabout 5 nm to about 80 nm, with a thickness from about 10 nm to about 50nm being more typical. Preferably, the second cap layer 220 is in directcontact with the metal cap layer 212 and the remaining first dielectriccap layer 210A.

Optionally, the structure shown in FIG. 7 may be subjected to a touch-uppolishing step which removes a portion of the second dielectric caplayer 220 and provides the planar interconnect structure shown in FIG.8. CMP and/or grinding may be used in this step of the presentinvention.

While the present invention has been particularly shown and describedwith respect to preferred embodiments, it will be understood by thoseskilled in the art that the foregoing and other changes in forms anddetails may be made without departing from the spirit and scope of theinvention. It is therefore intended that the present invention not belimited to the exact forms and details described and illustrated butfall within the scope of the appended claims.

What is claimed is:
 1. An interconnect structure comprising: adielectric layer having a conductive feature embedded therein, saidconductive feature having a first top surface that is substantiallycoplanar with a second top surface of said dielectric layer; a metal caplayer located directly on said first top surface, wherein said metal caplayer does not substantially extend onto said second top surface; afirst dielectric cap layer located directly on said second top surface,wherein said first dielectric cap layer does not substantially extendonto said first top surface and said first dielectric cap layer isthicker than said metal cap layer; and a second dielectric cap layerdirectly on said metal cap layer and directly on said first dielectriccap layer, wherein the metal cap layer consists of: i) a metal or ii) acombination of metals and wherein the metal cap layer has asubstantially uniform composition profile.
 2. The interconnect structureof claim 1, wherein said first dielectric cap layer has a thickness fromabout 5 nm to about 80 nm.
 3. The interconnect structure of claim 1,wherein said metal cap layer has a thickness from about 1 nm to about 20nm.
 4. The interconnect structure of claim 1, wherein said seconddielectric cap layer has a thickness from about 5 nm to about 80 nm. 5.The interconnect structure of claim 1, wherein said second dielectriccap layer is in contact with said metal cap layer and said firstdielectric cap layer.
 6. The interconnect structure of claim 1, whereinsaid metal cap layer has a bottom surface that is substantially coplanarwith a bottom surface of said first dielectric cap layer.
 7. Theinterconnect structure of claim 1, wherein said metal cap layer is Co,Ru, Ir, Rh, Pt, Ta, W, Mn, Mo, Ni, Ti, Al or an alloy comprising two ormore of the foregoing metals.
 8. The interconnect structure of claim 1,wherein said first dielectric cap layer is SiN, SiC, Si4NH3, SiO2, acarbon doped oxide, a nitrogen and hydrogen doped silicon carbide(SiC(N,H)) or a combination of two or more of the foregoing materials.9. The interconnect structure of claim 1, wherein said second dielectriccap layer is SiN, SiC, Si4NH3, SiO2, a carbon doped oxide, a nitrogenand hydrogen doped silicon carbide (SiC(N,H)) or a combination of two ormore of the foregoing materials.
 10. The interconnect structure of claim1, wherein said dielectric layer has a dielectric constant of about 4.0or less.
 11. The interconnect structure of claim 1, wherein saidconductive feature is Cu, Al, W, Ag, Ti, Ta, or an alloy comprising theaforementioned metals and other elements.
 12. An interconnect structurecomprising: a dielectric layer having a conductive feature embeddedtherein, said conductive feature having a first top surface that issubstantially coplanar with a second top surface of said dielectriclayer; a metal cap layer located directly on said first top surface,wherein said metal cap layer does not substantially extend onto saidsecond top surface; a first dielectric cap layer located directly onsaid second top surface, wherein said first dielectric cap layer hasbottom surface that is substantially flush with a bottom surface of themetal cap layer, wherein the first dielectric cap layer has asubstantially uniform composition profile, and wherein said firstdielectric cap layer is thicker than said metal cap layer; and a seconddielectric cap layer directly on said metal cap layer and directly onsaid first dielectric cap layer, wherein the first dielectric cap layerand the second dielectric layer consist of a material having no elementsin common with the metal cap layer.